Silicon Carbide Cantilevers naa

Ngwaahịa zuru ezu na ngwa
Nnukwu wafer na-ebugharị ike silicon carbide SiSiC / SiC cantilever paddle / beam kwesịrị ekwesị maka usoro robot na-arụ ọrụ na njikwa maka na ọ nwere arụmọrụ arụmọrụ, na-enweghị nrụrụ na nnukwu okpomọkụ na nnukwu ike na-ebu ọkụ. Ebe ọ bụ na ngalaba nke cantilever paddle kwụsiri ike na-enweghị nrụrụ, ọ ga-ekwe omume iji tubes ọkụ dị adị buru ibu karịa. Enwere ike itinye SiSiC / SiC cantilever paddle / bekee nnukwu wafer na-ebu ike iji tinye aka na LPVCD dabere na mgbakwunye mgbatị ọkụ ya na mkpuchi LPVCD, nke na-eme ka mmezi na nhicha dị ogologo, ma belata mmetọ.

Nkà na ụzụ nke mmeghachi omume nkekọ silicon carbide RBSIC: 

Atụmatụ:
a. Ọ na-adịghị deform na elu okpomọkụ na wafer loading ike bụ nnukwu;
b. Magburu onwe thermal ujo eguzogide na ogologo ọrụ ndụ;
c. ihe Ọnọdụ mgbasawanye nke okpomoku nke cantilever paddle dị obere, nke na-eme ka mmezi na nhicha dị ogologo.
ma belata oke mmetọ

Ngwongwo ndi ozo ndi ozo nke silicon carbide seramiiki mere 
E wezụga Reaction sintered silicon carbide SiSiC cantilever paddle maka wafer loading, anyị na-emepụta ndị ọzọ n'ekwú na ngwá ụlọ gụnyere RBSIC / SISIC sịlịkọn carbide ibé, nozulu akpa, gburugburu nozulu tube, swirl nozulu tube, oxide bonded SIC sịlịkọn carbide batts / setter efere na RBSIC jụrụ ọkpọkọ .

Yiri ngwaahịa RBSIC / SISIC silicon carbide
N'ihi na ngwaahịa RBSIC / SISIC silicon carbide anyị nwere uru nke nguzogide magburu onwe ya, nguzogide corrosion na ndụ ogologo ndụ, enwere ike ịme ya ka ọ bụrụ akwa mgbochi na-eguzogide ọgwụ nke enwere ike itinye ngwa ngwa na nhazi ọkpọkọ ma ọ bụ cyclones.